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Mask Aligner

 


MJB4


 

MJB4

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Features and Benefits

  • High resolution manual mask aligner capable to print features of 0.5 µm
  • Wafer and substrate handling up to 4" (wafers), 4"x4" (substrates)
  • Special substrate chucks for pieces, III-V materials, thick substrates, hybrids and HF components
  • High precision X, Y, Q alignment stage and microscope manipulator
  • High intensity optical setups for different UV- exposure wavelengths up to 90mW/cm²


The SUSS MJB4 is the next generation version of the highly popular manual mask aligner the SUSS MJB3. It is the ideal, economical unit for laboratories and small series production. In its contact exposure modes, the equipment can achieve a resolution of 0.5 µm, a performance unsurpassed in any other comparable machine.

The machine is widely used for MEMS and optoelectronics applications. It is specially configured for handling non-standard substrates such as hybrids, high-frequency components or fragile III-V materials, such as GaAs or InP. The tool can be equipped with either a SUSS Singlefield or a Splitfield Microscope enabling fast and highly accurate alignment.

 


MA/BA6


 

MA200Compact

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Features and Benefits

  • Accurate and precise gap setting for higher yield
  • Parameter storage saves set-up time and improves process consistency
  • High-quality exposure optics: Diffraction reducing lenses provide high resolution and optimum edge quality with thick resists
  • High intensity light sources reduce process time
  • Intelligent exposure control unit monitors lamp intensity and life time

 


The SUSS MA6 Mask Aligner is regarded as the benchmark from semiconductor submicron research to 3D micro-system production. The innovative systems meets customer's needs for precision, reliability and low cost of ownership.

The versatile MA6 is available with bottom-side-alignment microscopes for accurate backside processes. Bottom-side-alignment has become an important feature, especially in Microsystem Technology.

For all classic lithography and topside alignment an eyepiece or a dual video microscope are available. Beside the standard lithography application with diffraction reducing exposure optics for highest resolution the MA6 Mask Aligner offers special techniques for :

  • Bond Alignment,
  • Near Field Holography,
  • UV-Curing processes,
  • UV-NIL, etc.
 


MA/BA8


 

MA200Compact

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Features and Benefits

  • Multiple exposure modes and precise gap setting for optimized lithography processes
  • Dual video or eye piece microscope
  • BSA microscope with dual magnification
  • SUSS image storage for precision alignment even in large gaps
  • Optimum exposure quality also in thick resists:
    steep edge slopes and high aspect ratio


The SUSS MA8 Maks Aligner is the system solution for 200mm lithography applications for development and pilot production of IC back end processes. The MA8 provides full laboratory mask aligner versatility and flexibility. The compatibility of the exposure modes allows processes to be developed on the MA8 which can then be run in production on a SUSS MA200 Production Mask Aligner.

The MA8 meets the requirements of back end applications such as passivation and thin film bumping. Thick resist performance also recommends the MA8 for microsystem technology applications where bottom side alignment is requested. The MA8 is also regarded as an ideal tool for telecom and optoelectronics applications.

Beside the standard lithography application with diffraction reducing exposure optics for highest resolution the MA8 offers special techniques for:

  • Bond Alignment,
  • Near Field Holography,
  • UV-Curing processes,
  • UV-NIL, etc.

 

 

 

 

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Tel (662) 444-4655 (5 Auto), Fax (662) 4444-650 THAILAND
email : nok@ndn.co.th