The SUSS MA6 Mask
Aligner is regarded as the benchmark from semiconductor
submicron research to 3D micro-system production. The
innovative systems meets customer's needs for precision,
reliability and low cost of ownership.
The versatile MA6 is
available with bottom-side-alignment microscopes for
accurate backside processes. Bottom-side-alignment has
become an important feature, especially in Microsystem
Technology.
For all classic
lithography and topside alignment an eyepiece or a dual
video microscope are available. Beside the standard
lithography application with diffraction reducing
exposure optics for highest resolution the MA6 Mask
Aligner offers special techniques for :
- Bond
Alignment,
- Near Field
Holography,
- UV-Curing
processes,
- UV-NIL, etc.